---

name: cleanroom-metrology-controller description: Nanofabrication metrology skill for process control with CD-SEM, ellipsometry, and profilometry allowed-tools:

• Read
• Write
• Glob
• Grep
• Bash metadata: specialization: nanotechnology domain: science category: fabrication priority: high phase: 6 tools-libraries:
  • CDSEM recipe managers
  • Ellipsometry fitting software graph: domains: [domain:nanotechnology] skillAreas: [skill-area:mathematical-reasoning, skill-area:physics-simulation, skill-area:data-analysis] workflows: [workflow:experiment-design] roles: [role:research-engineer]

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Cleanroom Metrology Controller

Purpose

The Cleanroom Metrology Controller skill provides comprehensive in-line metrology for nanofabrication process control, enabling precise measurement and monitoring of critical dimensions, film thicknesses, and pattern quality.

Capabilities

• CD-SEM measurement recipes
• Spectroscopic ellipsometry analysis
• Film thickness mapping
• Surface profilometry
• Defect inspection
• Overlay measurement

Usage Guidelines

Metrology Control

1. CD-SEM Measurements

   • Develop automated recipes
   • Calibrate against reference
   • Track process variation

2. Ellipsometry

   • Select appropriate model
   • Map thickness uniformity
   • Characterize optical constants

3. Defect Inspection

   • Set detection thresholds
   • Classify defect types
   • Track yield trends

Process Integration

• All fabrication processes
• Analysis Pipeline Validation

Input Schema

{
  "measurement_type": "cd_sem|ellipsometry|profilometry|defect",
  "target_parameter": "string",
  "wafer_map": {"sites": "number", "pattern": "string"},
  "specification": {
    "target": "number",
    "tolerance": "number"
  }
}

Output Schema

{
  "measurements": [{
    "site": "string",
    "value": "number",
    "unit": "string"
  }],
  "statistics": {
    "mean": "number",
    "std_dev": "number",
    "range": "number"
  },
  "uniformity": "number (%)",
  "pass_fail": "boolean",
  "trending_data": {"dates": [], "values": []}
}